| Item |
Specifications |
| LMSP-X1 |
LMSP-X2 |
 |
 |
Motor |
Forcer: hybrid planar motor
Stator: integral grid platen |
| Support |
Air bearing |
| Position sensing |
Direct feedback through position sensors in 3 axes (X1/X2/Y) |
| Control |
Position |
Direct feedback servo control of X, Y and yaw error |
| Commutation control |
Amplitude/phase control using 2-phase sine wave linear amplifier |
|
 |
Max. force |
75 N |
140 N |
| Max. speed |
0.9m/s |
0.8m/s |
| Forcer weight |
1.8 kg |
3.7 kg |
| Max. Load |
14 kg |
28 kg |
| Air flow rate |
6.4 liter/min |
21 liter/min |
| Air supply pressure for bearing |
3.0±0.3bar |
| XY stage accuracy |
±15 µ m |
| Position sensor resolution |
X,Y |
1 µ m |
| Yaw |
0.8 arc-second |
| Positioning resolution |
X.Y |
1 µ m |
| Repeatability |
X.Y |
3 µ m |
